The deposition of amorphous and amorphous hydrogenated silicon with embedded cubic Mg.sub.2./sub.Si nanoparticles

Stuchlíková, The-Ha; Stuchlík, Jiří; Remeš, Zdeněk; Fajgar, Radek; Galkin, N.G.; Galkin, K.N.; Chernev, I.M.

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The deposition of amorphous and amorphous hydrogenated silicon with embedded cubic Mg.sub.2./sub.Si nanoparticles

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SYSNO ASEP	0486272
Document Type	C - Proceedings Paper (int. conf.)
R&D Document Type	Conference Paper
Title	The deposition of amorphous and amorphous hydrogenated silicon with embedded cubic Mg₂Si nanoparticles
Author(s)	Stuchlíková, The-Ha (FZU-D)_{RID, ORCID} Stuchlík, Jiří (FZU-D)_{RID, ORCID} Remeš, Zdeněk (FZU-D)_{RID, ORCID} Fajgar, Radek (UCHP-M)_{RID, ORCID, SAI} Galkin, N.G. (RU) Galkin, K.N. (RU) Chernev, I.M. (RU)
Number of authors	7
Source Title	NANOCON 2013 - 5th International Conference Proceedings. - Ostrava : TANGER Ltd, 2014 - ISBN 978-80-87294-47-5
Pages	s. 145-150
Number of pages	6 s.
Publication form	Online - E
Action	5th International Conference Nanocon 2013
Event date	16.10.2013 - 18.10.2013
VEvent location	Brno
Country	CZ - Czech Republic
Event type	WRD
Language	eng - English
Country	CZ - Czech Republic
Keywords	Mg₂Si nanoparticles ; a-Si/a-Si:H matrix ; RDA ; PECVD ; RLA
Subject RIV	BM - Solid Matter Physics ; Magnetism
OECD category	Condensed matter physics (including formerly solid state physics, supercond.)
Subject RIV - cooperation	Institute of Chemical Process Fundamentals - Physical ; Theoretical Chemistry
Institutional support	FZU-D - RVO:68378271 ; UCHP-M - RVO:67985858
UT WOS	000352070900024
Annotation	We study possibilities how to increase a by usage of magnesium silicide nanoparticles (Mg2Si-NPs) in structure of Si: H. In this paper we introduce two technics -combination of PECVD and Vacuum Evaporation (VE) and Reactive Laser Ablation (RLA) -for preparation of cubic structure of Mg2Si-NPs in amorphous (a-Si) or amorphous hydrogenated (a-Si: H) silicon matrix. Formation of Mg2Si-NPs was proved by Raman spectroscopy. Likewise we introduce optical changes measured at absorption edge and the first results on realized NIP structures.
Workplace	Institute of Physics
Contact	Kristina Potocká, potocka@fzu.cz, Tel.: 220 318 579
Year of Publishing	2018

Number of the records: 1