The deposition of amorphous and amorphous hydrogenated silicon with embedded cubic Mg.sub.2./sub.Si nanoparticles

STUCHLÍKOVÁ, T.-H., STUCHLÍK, J., REMEŠ, Z., FAJGAR, R., GALKIN, N.G., GALKIN, K.N., CHERNEV, I.M. The deposition of amorphous and amorphous hydrogenated silicon with embedded cubic Mg₂Si nanoparticles. In: NANOCON 2013 - 5th International Conference Proceedings. Ostrava: TANGER Ltd, 2014, s. 145-150. ISBN 978-80-87294-47-5.