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Scratch and dig analysis for Metis mirrors surfaces defects evaluation
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SYSNO 0469297 Title Scratch and dig analysis for Metis mirrors surfaces defects evaluation Author(s) Špína, Michal (UFP-V) [TOPTEC]
Procháska, František (UFP-V) [TOPTEC] RID
Melich, Radek (UFP-V) [TOPTEC] RIDSource Title Proceedings of SPIE 10151, Optics and Measurement International Conference 2016, OAM 2016 Proceedings, 10151. - Bellingham : SPIE, Society of Photo-Optical Instrumentation Engineers, 2016 / Kovačičinová J. Conference OAM 2016, Optics and Measurement International Conference 2016, 11.10.2016 - 14.10.2016, Liberec Article number 101510W Document Type Konferenční příspěvek (zahraniční konf.) Grant LO1206 GA MŠMT - Ministry of Education, Youth and Sports (MEYS), CZ - Czech Republic Institutional support UFP-V - RVO:61389021 Language eng Country US Keywords Scratch and Dig * surface imperfections * optical surface * spot equivalent diameter * line equivalent width * surface quality measurement URL http://dx.doi.org/10.1117/12.2256634 Permanent Link http://hdl.handle.net/11104/0267105
Number of the records: 1