Fabrication methods of diamond coated Love wave SAW biosensors for bacterial detection applications

0456614 - FZÚ 2016 RIV CZ eng K - Conference Paper (Czech conference)
Drbohlavová, L. - Bulíř, J. - Valeš, Václav - Jákl Křečmarová, M. - Taylor, Andrew - Talbi, A. - Soltani, A. - Mortet, Vincent
Fabrication methods of diamond coated Love wave SAW biosensors for bacterial detection applications.
Instruments and methods for biology and medicine 2015. Praha: CTU, 2015 - (Vondrová, Š.), s. 11-14. ISBN 978-80-01-05851-0.
[Instruments and methods for biology and medicine 2015. Kladno (CZ), 28.05.2015-28.05.2015]
R&D Projects: GA AV ČR(CZ) Fellowship J. E. Purkyně; GA ČR GA13-31783S; GA MŠMT LO1409; GA MŠMT(CZ) LM2011029
Grant - others:AV ČR(CZ) Fellowship J. E. Purkyně; OP VK(XE) CZ.1.07/2.3.00/20.0306; SAFMAT(XE) CZ.2.16/3.1.00/22132
Program: Fellowship J. E. Purkyně
Institutional support: RVO:68378271 ; RVO:61388955
Keywords : biosensors * LW-SAW
Subject RIV: BM - Solid Matter Physics ; Magnetism

Pathogen detection has a huge importance in the food industry and it can play significant role in the medical practice. This paper focus on the fabrication methods of diamond coated Love wave surface acoustic wave (LW-SAW) biosensors for bacteria detection. LW-SAW sensors have been fabricated on AT-quartz crystals. Interdigitated transducers have been patterned by RF sputtering and photolithography techniques. Amorphous silicon oxide (SiO2) guiding layer and nano-crystalline diamond layer were both deposited by plasma enhanced chemical vapor deposition at low temperature. Preliminary experimental study of diamond surface termination for sensors bio-functionalization is also reported.
Permanent Link: http://hdl.handle.net/11104/0257118