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Multitarget sputtering of piezoelectric mixed oxide thin films onto flexible substrates
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SYSNO 0450607 Title Multitarget sputtering of piezoelectric mixed oxide thin films onto flexible substrates Author(s) Kleiner, A. (DE)
Suchaneck, G. (DE)
Dejneka, Alexandr (FZU-D) RID, ORCID
Jastrabík, Lubomír (FZU-D) RID, ORCID
Lavrentiev, V. (RU)
Kiselev, D.A. (RU)
Gerlach, G. (DE)Source Title Oxide Materials for Electronic Engineering - Fabrication, Properties and Application, vol. 230, Solid State Phenomena. S. 3-7. - Pfaffikon : Scientific.Net, 2015 / Ubizskii S. ; Vasylechko L. ; Zhydachevskii Y. Conference Oxide Materials for Electronic Engineering – Fabrication, Properties and Applications (ОМЕЕ 2014), Lviv, 26.05.2014-30.05.2014 Document Type Konferenční příspěvek (zahraniční konf.) Institutional support FZU-D - RVO:68378271 Language eng Country CH Keywords complex oxide film deposition * PZT * multitarget reactive magnetron sputtering * flexible polymer substrate * XPS * PFM Permanent Link http://hdl.handle.net/11104/0251878
Number of the records: 1