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Multitarget sputtering of piezoelectric mixed oxide thin films onto flexible substrates
- 1.KLEINER, A., SUCHANECK, G., DEJNEKA, Alexandr, JASTRABÍK, Lubomír, LAVRENTIEV, V., KISELEV, D.A., GERLACH, G. Multitarget sputtering of piezoelectric mixed oxide thin films onto flexible substrates. In: UBIZSKII, S., VASYLECHKO, L., ZHYDACHEVSKII, Y., eds. Oxide Materials for Electronic Engineering - Fabrication, Properties and Application, vol. 230. Solid State Phenomena. Pfaffikon: Scientific.Net, 2015, s. 3-7. Solid State Phenomena, 230. ISBN 978-3-03835-428-4. ISSN 1662-9779. Available: doi: 10.4028/www.scientific.net/SSP.230.3
Number of the records: 1