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Time-resolved tuned diode laser absorption spectroscopy of pulsed plasma
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SYSNO ASEP 0439672 Document Type C - Proceedings Paper (int. conf.) R&D Document Type Conference Paper Title Time-resolved tuned diode laser absorption spectroscopy of pulsed plasma Author(s) Adámek, Petr (FZU-D) RID, ORCID
Do, H.T. (DE)
Čada, Martin (FZU-D) RID, ORCID, SAI
Hubička, Zdeněk (FZU-D) RID, ORCID, SAI
Hippler, R. (DE)Source Title Journal of Physics: Conference Series, 511. - Bristol : IOP Publishing, 2014 - ISSN 1742-6596 Pages "012088-1"-"012088-6" Number of pages 6 s. Publication form Print - P Action International Congress on Plasma Physics (ICPP) / 13th Latin American Workshop on Plasma Physics (LAWPP)/15./ Event date 08.08.2010-13.08.2010 VEvent location Santiago, CHILE Country CL - Chile Event type WRD Language eng - English Country GB - United Kingdom Keywords magnetron discharge ; aluminum Subject RIV BL - Plasma and Gas Discharge Physics R&D Projects KAN301370701 GA AV ČR - Academy of Sciences of the Czech Republic (AV ČR) GP202/09/P159 GA ČR - Czech Science Foundation (CSF) KJB100100805 GA AV ČR - Academy of Sciences of the Czech Republic (AV ČR) 1M06002 GA MŠMT - Ministry of Education, Youth and Sports (MEYS) Institutional support FZU-D - RVO:68378271 UT WOS 000337223400088 EID SCOPUS 84901639737 DOI 10.1088/1742-6596/511/1/012088 Annotation A novel method for time-resolved tuned diode laser absorption spectroscopy has been developed. In this paper, we describe in detail developed electronic module that controls time-resolution of laser absorption spectroscopy system. The TTL signal triggering plasma pulse is used for generation of two signals: the first one triggers the fine tuning of laser wavelength and second one controls time-defined signal sampling from absorption detector. The described method and electronic system enable us to investigate temporal evolution of sputtered particles in technological low-temperature plasma systems. The pulsed DC planar magnetron sputtering system has been used to verify this method. The 2” in diameter titanium target was sputtered in pure argon atmosphere. The working pressure was held at 2 Pa. All the experiments were carried out for pulse ON time fixed at 100 μs. Workplace Institute of Physics Contact Kristina Potocká, potocka@fzu.cz, Tel.: 220 318 579 Year of Publishing 2015
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