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Some Other Gratings: Benchmarks for Large-Area E-Beam Nanopatterning
- 1.MELUZÍN, Petr, HORÁČEK, Miroslav, URBÁNEK, Michal, BOK, Jan, KRÁTKÝ, Stanislav, MATĚJKA, Milan, CHLUMSKÁ, Jana, KOLAŘÍK, Vladimír. Some Other Gratings: Benchmarks for Large-Area E-Beam Nanopatterning. In: NANOCON 2014. 6th International conference proceedings. Ostrava: TANGER, 2014. ISBN 978-80-87294-55-0.
Number of the records: 1