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Diamond growth on germanium as chemically and temperature sensitive substrate
- 1.0423916 - FZÚ 2014 RIV SK eng C - Conference Paper (international conference)
Babchenko, Oleg - Kozak, Halyna - Remeš, Zdeněk - Stuchlík, Jiří - Kromka, Alexander
Diamond growth on germanium as chemically and temperature sensitive substrate.
Proceedings of 8th Solid State Surfaces and Interfaces. Bratislava: Comenius University, 2013 - (Brunner, R.), s. 23-24. ISBN 978-80-223-3501-0.
[Solid State Surfaces and Interfaces /8./. Smolenice (SK), 25.11.2013-28.11.2013]
R&D Projects: GA ČR GAP108/12/0910; GA MŠMT LH12236
Institutional support: RVO:68378271
Keywords : diamond * germanium * infrared spectroscopy
Subject RIV: JJ - Other Materials
In this contribution we present the study on the diamond growth on germanium substrates. The diamond thin film was deposited by the microwave plasma assisted chemical vapor deposition process utilizing either focused or linear antenna arrangement. Using the optimized deposition process the germanium prism for IR spectroscopy was successfully coated with the diamond film.
Permanent Link: http://hdl.handle.net/11104/0229952
Number of the records: 1