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Determination of mechanical properties from microcompression test
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SYSNO ASEP 0387901 Document Type C - Proceedings Paper (int. conf.) R&D Document Type Conference Paper Title Determination of mechanical properties from microcompression test Author(s) Truhlář, Michal (UFM-A)
Kruml, Tomáš (UFM-A) RID, ORCID
Kuběna, Ivo (UFM-A) RID, ORCID
Petráčková, Klára (UFM-A)
Náhlík, Luboš (UFM-A) RID, ORCIDNumber of authors 5 Source Title Engineering Mechanics 2012. - Prague : ITAM AS CR, v. v. i., 2012 / Náprstek J. ; Fischer C. - ISBN 978-80-86246-40-6 Pages s. 1435-1440 Number of pages 6 s. Publication form Medium - C Action Engineering Mechanics 2012 /18./ Event date 14.05.2012-17.05.2012 VEvent location Svratka Country CZ - Czech Republic Event type EUR Language eng - English Country CZ - Czech Republic Keywords microcompression ; thin film properties ; focused ion beam ; Young modulus ; FEM Subject RIV JL - Materials Fatigue, Friction Mechanics Institutional support UFM-A - RVO:68081723 Annotation This paper describes a microcompression test of Al - 1.5 wt. % Cu thin film deposited on Si substrate. Microcompression combines the sample preparation with the use of ion focused beam (FIB) with a compression test carried out using nanoindenter. Cylindrical specimens (pillars) were prepared using FIB. The diameter of pillars was about 1.3 μm and their height was about 2 μm (equal to the film thickness). Stress-strain curves of the thin film were obtained. The results depend on crystallographic orientation of pillar. The paper is focused to an attempt to determine as precisely as possible Young modulus of the film using experimental data and finite element modelling. Workplace Institute of Physics of Materials Contact Yvonna Šrámková, sramkova@ipm.cz, Tel.: 532 290 485 Year of Publishing 2013
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