New detection systems of secondary and backscattered electrons for environmental scanning electron microscopes

0379919 - ÚPT 2013 RIV AU eng C - Conference Paper (international conference)
Neděla, Vilém - Konvalina, Ivo - Lencová, B. - Zlámal, J. - Jirák, J.
New detection systems of secondary and backscattered electrons for environmental scanning electron microscopes.
Coneference Proceedings APMC-10, ICONN 2012 and ACMM-22. Wembley: EECW Pty Ltd, 2012, 370:1-2. ISBN 978-1-74052-245-8.
[Asia-Pacific Microscopy Conference (APMC-10) - International Conference on Nanoscience and Nanotechnology (ICONN 2012) - Australian Conference on Microscopy and Microanalysis (ACMM-22). Perth (AU), 05.02.2012-09.02.2012]
R&D Projects: GA ČR GAP102/10/1410; GA MŠMT EE.2.3.20.0103
Institutional support: RVO:68081731
Keywords : environmental scanning electron microscope * detection systems * secondary electrons * backscattered electrons
Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering

This article is focussed on describing the working principles of newly introduced systems for detecting secondary and backscattered electrons in high pressure conditions of a specimen chamber in environmental scanning electron microscopes.
Permanent Link: http://hdl.handle.net/11104/0210770