Ionisation Detector for Environmental Scanning Microscope

0372211 - ÚPT 2012 RIV eng P - Patent Document
Neděla, Vilém - Jirák, Josef
Ionisation Detector for Environmental Scanning Microscope.
2011. Owner: Ústav přístrojové techniky AV ČR, v. v. i. Date of the patent acceptance: 23.11.2011. Patent Number: EP2195822
Institutional research plan: CEZ:AV0Z20650511
Keywords : ionisation detector * secondary electrons * electrostatic separator
Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering
https://data.epo.org/publication-server/pdf-document?pn=2195822&ki=B1&cc=EP

The basic philosophy of the ionisation detector of secondary electrons with electrostatic separator (ISEDS), is to optimize the physical principle of the detection of signal electrons in high pressure conditions of VP SEM in order to achieve a higher purity of the secondary electrons signal with a minimal contribution of backscattered electrons. Suitably situated electrostatic fields of separator of ISEDS, placed mainly above and around observed sample, efficiently filter away the high energy BSEs and enable to detect low energy SEs with high selectivity.
Permanent Link: http://hdl.handle.net/11104/0205582