The deposition of 3C-SiC thin films onto the (111) and (110) faces of Si using pulsed sputtering of a hollow cathode

Number of the records: 1

1.

SYSNO	0370779
Title	The deposition of 3C-SiC thin films onto the (111) and (110) faces of Si using pulsed sputtering of a hollow cathode
Author(s)	Huguenin-Love, J.L. (US) Lauer, N.T. (US) Soukup, R. J. (US) Ianno, N.J. (US) Kment, Štěpán (FZU-D)_{RID, ORCID} Hubička, Zdeněk (FZU-D)_{RID, ORCID, SAI}
Source Title	Materials Science Forum. 645-648, 1-2 (2010), s. 131-134
Conference	International Conference on Silicon Carbide and Related Materials Location /13./, Nurnberg, 11.10.2009-16.10.2009
Document Type	Článek v odborném periodiku
CEZ	AV0Z10100522 - FZU-D (2005-2011)
Language	eng
Country	CH
Keywords	sputtering * pulse * germanium * 3C
Permanent Link	http://hdl.handle.net/11104/0204474

Number of the records: 1