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Plasma polymer multilayers of organosilicones and their optical properties controlled by RF power
- 1.0365318 - ÚJF 2013 RIV CH eng J - Journal Article
Kontarova, S. - Peřina, Vratislav - Čech, V.
Plasma polymer multilayers of organosilicones and their optical properties controlled by RF power.
Surface and Coatings Technology. Roč. 205, Suppl.2 (2011), s. 451-454. ISSN 0257-8972. E-ISSN 1879-3347
Institutional research plan: CEZ:AV0Z10480505
Keywords : Plasma polymerization * Multilayer * Ellipsometry * Refractive index
Subject RIV: BL - Plasma and Gas Discharge Physics
Impact factor: 1.867, year: 2011
Hydrogenated amorphous carbon-silicon alloys were prepared from tetravinylsilane monomer using plasma-enhanced chemical vapor deposition at different powers (10-70 W). The optical properties of the plasma polymer films were analyzed by spectroscopic ellipsometry in the range 250-830 nm. The refractive index of pp-TVS films can be controlled by RF power, which for a wavelength of 633 nm ranged from 1.69 (10 W) to 2.08 (70 W).
Permanent Link: http://hdl.handle.net/11104/0200586
Number of the records: 1