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Mechanical and tribological properties of coatings sputtered from SiC target in the presence of CH.sub.4./sub. gas

  1. 1.
    SYSNO0359397
    TitleMechanical and tribological properties of coatings sputtered from SiC target in the presence of CH4 gas
    Author(s) Kulykovskyy, Valeriy (FZU-D) RID
    Vorlíček, Vladimír (FZU-D) RID
    Čtvrtlík, Radim (FZU-D) RID, ORCID
    Boháč, Petr (FZU-D) RID, ORCID
    Suchánek, J. (CZ)
    Bláhová, O. (CZ)
    Jastrabík, Lubomír (FZU-D) RID, ORCID
    Source Title Surface and Coatings Technology. Roč. 205, č. 11 (2011), s. 3372-3376. - : Elsevier
    Document TypeČlánek v odborném periodiku
    Grant KAN301370701 GA AV ČR - Academy of Sciences of the Czech Republic (AV ČR)
    1M06002 GA MŠMT - Ministry of Education, Youth and Sports (MEYS), CZ - Czech Republic
    CEZAV0Z10100522 - FZU-D (2005-2011)
    Languageeng
    CountryCH
    Keywords amorphous SiC films * sputtering * hardness * coefficient of friction * Raman spectra
    Permanent Linkhttp://hdl.handle.net/11104/0197192
     
Number of the records: 1  

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