Number of the records: 1
Mechanical and tribological properties of coatings sputtered from SiC target in the presence of CH.sub.4./sub. gas
- 1.
SYSNO ASEP 0359397 Document Type J - Journal Article R&D Document Type Journal Article Subsidiary J Článek ve WOS Title Mechanical and tribological properties of coatings sputtered from SiC target in the presence of CH4 gas Author(s) Kulykovskyy, Valeriy (FZU-D) RID
Vorlíček, Vladimír (FZU-D) RID
Čtvrtlík, Radim (FZU-D) RID, ORCID
Boháč, Petr (FZU-D) RID, ORCID
Suchánek, J. (CZ)
Bláhová, O. (CZ)
Jastrabík, Lubomír (FZU-D) RID, ORCIDSource Title Surface and Coatings Technology. - : Elsevier - ISSN 0257-8972
Roč. 205, č. 11 (2011), s. 3372-3376Number of pages 6 s. Language eng - English Country CH - Switzerland Keywords amorphous SiC films ; sputtering ; hardness ; coefficient of friction ; Raman spectra Subject RIV BM - Solid Matter Physics ; Magnetism R&D Projects KAN301370701 GA AV ČR - Academy of Sciences of the Czech Republic (AV ČR) 1M06002 GA MŠMT - Ministry of Education, Youth and Sports (MEYS) CEZ AV0Z10100522 - FZU-D (2005-2011) UT WOS 000287906900005 DOI 10.1016/j.surfcoat.2010.11.057 Annotation In the present work the amorphous hydrogenated silicon-carbide (a-SiC:H) films with different C/Si ratio were prepared at room temperature using DC magnetron sputtering in two ways: (i) sputtering of silicon target; (ii) sputtering of SiC target, both in the gas mixture of Ar and CH4. In the latter case the films contained less hydrogen at the same C/Si ratio. The mechanical and tribological properties of these films were studied to find their optimum combination. The hardness, elastic modulus (nanoindentation), intrinsic stress (Stoney's formula) and coefficient of friction (pin on disc tribometer) were examined in dependence on the technological parameters, film structure and composition (Raman spectra, electron probe microanalysis). Workplace Institute of Physics Contact Kristina Potocká, potocka@fzu.cz, Tel.: 220 318 579 Year of Publishing 2012
Number of the records: 1