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Mechanical and tribological properties of coatings sputtered from SiC target in the presence of CH.sub.4./sub. gas

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    0359397 - FZÚ 2012 RIV CH eng J - Journal Article
    Kulykovskyy, Valeriy - Vorlíček, Vladimír - Čtvrtlík, Radim - Boháč, Petr - Suchánek, J. - Bláhová, O. - Jastrabík, Lubomír
    Mechanical and tribological properties of coatings sputtered from SiC target in the presence of CH4 gas.
    Surface and Coatings Technology. Roč. 205, č. 11 (2011), s. 3372-3376. ISSN 0257-8972
    R&D Projects: GA AV ČR KAN301370701; GA MŠMT(CZ) 1M06002
    Institutional research plan: CEZ:AV0Z10100522
    Keywords : amorphous SiC films * sputtering * hardness * coefficient of friction * Raman spectra
    Subject RIV: BM - Solid Matter Physics ; Magnetism
    Impact factor: 1.867, year: 2011

    Permanent Link: http://hdl.handle.net/11104/0197192
     
Number of the records: 1  

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