Mechanical and tribological properties of coatings sputtered from SiC target in the presence of CH.sub.4./sub. gas

KULYKOVSKYY, V., VORLÍČEK, V., ČTVRTLÍK, R., BOHÁČ, P., SUCHÁNEK, J., BLÁHOVÁ, O., JASTRABÍK, L. Mechanical and tribological properties of coatings sputtered from SiC target in the presence of CH₄ gas. Surface and Coatings Technology. 2011, 205(11), 3372-3376. ISSN 0257-8972. Available: doi: 10.1016/j.surfcoat.2010.11.057