Number of the records: 1  

Comparison of calculated, simulated and measured signal amplification in variable pressure SEM

  1. 1.
    SYSNO ASEP0358591
    Document TypeJ - Journal Article
    R&D Document TypeJournal Article
    Subsidiary JČlánek ve WOS
    TitleComparison of calculated, simulated and measured signal amplification in variable pressure SEM
    Author(s) Neděla, Vilém (UPT-D) RID, ORCID, SAI
    Konvalina, Ivo (UPT-D) RID, ORCID, SAI
    Lencová, Bohumila (UPT-D) RID, SAI
    Zlámal, J. (CZ)
    Number of authors4
    Source TitleNuclear Instruments & Methods in Physics Research Section A. - : Elsevier - ISSN 0168-9002
    Roč. 645, č. 1 (2011), s. 79-83
    Number of pages5 s.
    Languageeng - English
    CountryNL - Netherlands
    Keywordselectron-gas interactions ; Monte Carlo simulations ; signal amplification ; analytical models
    Subject RIVJA - Electronics ; Optoelectronics, Electrical Engineering
    R&D ProjectsGAP102/10/1410 GA ČR - Czech Science Foundation (CSF)
    FR-TI1/118 GA MPO - Ministry of Industry and Trade (MPO)
    FR-TI1/305 GA MPO - Ministry of Industry and Trade (MPO)
    CEZAV0Z20650511 - UPT-D (2005-2011)
    UT WOS000292713900016
    EID SCOPUS79958188896
    DOI10.1016/j.nima.2010.12.200
    AnnotationThis paper presents computed dependencies of signal amplification of detected electrons on the water vapor pressure in a variable pressure SEM using the EOD software equipped with a Monte Carlo plug-in. We analyze the amplification at selected energies of signal electrons going through a high-pressure water vapor and total signal amplification by including a realistic simulation of the secondary emission from sample. The results are compared with experimental measurements and the dependencies of published analytical models.
    WorkplaceInstitute of Scientific Instruments
    ContactMartina Šillerová, sillerova@ISIBrno.Cz, Tel.: 541 514 178
    Year of Publishing2012
Number of the records: 1  

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