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Comparison of calculated, simulated and measured signal amplification in variable pressure SEM
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SYSNO ASEP 0358591 Document Type J - Journal Article R&D Document Type Journal Article Subsidiary J Článek ve WOS Title Comparison of calculated, simulated and measured signal amplification in variable pressure SEM Author(s) Neděla, Vilém (UPT-D) RID, ORCID, SAI
Konvalina, Ivo (UPT-D) RID, ORCID, SAI
Lencová, Bohumila (UPT-D) RID, SAI
Zlámal, J. (CZ)Number of authors 4 Source Title Nuclear Instruments & Methods in Physics Research Section A. - : Elsevier - ISSN 0168-9002
Roč. 645, č. 1 (2011), s. 79-83Number of pages 5 s. Language eng - English Country NL - Netherlands Keywords electron-gas interactions ; Monte Carlo simulations ; signal amplification ; analytical models Subject RIV JA - Electronics ; Optoelectronics, Electrical Engineering R&D Projects GAP102/10/1410 GA ČR - Czech Science Foundation (CSF) FR-TI1/118 GA MPO - Ministry of Industry and Trade (MPO) FR-TI1/305 GA MPO - Ministry of Industry and Trade (MPO) CEZ AV0Z20650511 - UPT-D (2005-2011) UT WOS 000292713900016 EID SCOPUS 79958188896 DOI Annotation This paper presents computed dependencies of signal amplification of detected electrons on the water vapor pressure in a variable pressure SEM using the EOD software equipped with a Monte Carlo plug-in. We analyze the amplification at selected energies of signal electrons going through a high-pressure water vapor and total signal amplification by including a realistic simulation of the secondary emission from sample. The results are compared with experimental measurements and the dependencies of published analytical models. Workplace Institute of Scientific Instruments Contact Martina Šillerová, sillerova@ISIBrno.Cz, Tel.: 541 514 178 Year of Publishing 2012
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