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A study of plasma parameters in hollow cathode plasma jet in pulse regime
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SYSNO 0357985 Title A study of plasma parameters in hollow cathode plasma jet in pulse regime Author(s) Kudrna, P. (CZ)
Klusoň, J. (CZ)
Leshkov, S. (CZ)
Chichina, M. (CZ)
Picková, I. (CZ)
Hubička, Zdeněk (FZU-D) RID, ORCID, SAI
Tichý, M. (CZ)Source Title Contributions to Plasma Physics. Roč. 50, č. 9 (2010), s. 886-891. - : Wiley Document Type Článek v odborném periodiku Grant GA202/09/0800 GA ČR - Czech Science Foundation (CSF) CEZ AV0Z10100522 - FZU-D (2005-2011) Language eng Country DE Keywords thin-films * system * deposition * RF * nitride Permanent Link http://hdl.handle.net/11104/0196140
Number of the records: 1