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Silicon monocrystal wafers ground with various abrasive materials
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SYSNO 0356591 Title Silicon monocrystal wafers ground with various abrasive materials Author(s) Havelková, Martina (FZU-D) RID, ORCID
Hiklová, Helena (FZU-D) RIDSource Title SILICON 2010. 12th Scientific and Business Conference. S. 289-290. - Rožnov pod Radhoštěm : TECON Scientific, s.r.o., 2010 / Vojtěchovský K. Conference Scientific and Business Conference SILICON 2010 /12./, Rožnov pod Radhoštěm, 02.11.2010-05.11.2010 Document Type Konferenční příspěvek (zahraniční konf.) Grant 1M06002 GA MŠMT - Ministry of Education, Youth and Sports (MEYS), CZ - Czech Republic KAN301370701 GA AV ČR - Academy of Sciences of the Czech Republic (AV ČR) CEZ AV0Z10100522 - FZU-D (2005-2011) Language eng Country CZ Keywords silicon monocrystal * abrasive materials Permanent Link http://hdl.handle.net/11104/0006343
Number of the records: 1