Education and research at clean room laboratory for silicon device technology at Masaryk University

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SYSNO	0352972
Title	Education and research at clean room laboratory for silicon device technology at Masaryk University
Author(s)	Mikulík, P. (CZ) Humlíček, J. (CZ) Kulha, P. (CZ) Hovorka, Miloš (UPT-D) Kadlec, Filip (FZU-D)_{RID, ORCID, SAI}
Source Title	XXXIX "Jaszowiec" International School and Conference on the Physics of Semiconductors. S. 242. - Warsaw : University of Warsaw, 2010
Conference	"Jaszowiec" International School and Conference on the Physics of Semiconductors /39./, Krynica Zdroj, 19.06.2010-24.06.2010
Document Type	Abstrakt
CEZ	AV0Z20650511 - UPT-D (2005-2011)
	AV0Z10100520 - FZU-D (2005-2011)
Language	eng
Country	PL
Keywords	silicon * clean room * microelectronics laboratory
Permanent Link	http://hdl.handle.net/11104/0192336

Number of the records: 1