Education and research at clean room laboratory for silicon device technology at Masaryk University

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SYSNO ASEP	0352972
Document Type	A - Abstract
R&D Document Type	The record was not marked in the RIV
R&D Document Type	Není vybrán druh dokumentu
Title	Education and research at clean room laboratory for silicon device technology at Masaryk University
Author(s)	Mikulík, P. (CZ) Humlíček, J. (CZ) Kulha, P. (CZ) Hovorka, Miloš (UPT-D) Kadlec, Filip (FZU-D)_{RID, ORCID, SAI}
Number of authors	5
Source Title	XXXIX "Jaszowiec" International School and Conference on the Physics of Semiconductors. - Warsaw : University of Warsaw, 2010 S. 242
Number of pages	1 s.
Action	"Jaszowiec" International School and Conference on the Physics of Semiconductors /39./
Event date	19.06.2010-24.06.2010
VEvent location	Krynica Zdroj
Country	PL - Poland
Event type	WRD
Language	eng - English
Country	PL - Poland
Keywords	silicon ; clean room ; microelectronics laboratory
Subject RIV	BM - Solid Matter Physics ; Magnetism
CEZ	AV0Z20650511 - UPT-D (2005-2011)
	AV0Z10100520 - FZU-D (2005-2011)
Annotation	We present education and research at university clean room microelectronics laboratory for silicon device technology opened at Masaryk University Brno.
Workplace	Institute of Scientific Instruments
Contact	Martina Šillerová, sillerova@ISIBrno.Cz, Tel.: 541 514 178
Year of Publishing	2011

Number of the records: 1