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Correction of sample tilt in FIB instruments
- 1.0352427 - ÚPT 2011 SG eng A - Abstract
Oral, Martin - Lencová, Bohumila
Correction of sample tilt in FIB instruments.
Eighth International Conference on Charged Particle Optics CPO-8. Singapore: National University of Singapore, 2010. s. 75-76.
[CPO /8./ International Conference on Charged Particle Optics. 12.07.2010-16.07.2010, Singapore]
R&D Projects: GA AV ČR IAA100650805
Institutional research plan: CEZ:AV0Z20650511
Keywords : particle optical instruments * elliptical spot * astigmatic focusing * optimization computation
Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering
A method of determining a correction was developed, which allows to compensate for both the ellipticity due to the tilt and the astigmatism and to achieve a circular spot on the titled sample. The compensation is provided by a suitable setting of two correcting quadruples and by refocusing the objective lens. The required settings of the quadrupole excitations and objective lens are obtained by a paraxial optimization.
Permanent Link: http://hdl.handle.net/11104/0191934
Number of the records: 1