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Advances in Low Energy Scanning Electron Microscopy
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SYSNO ASEP 0352422 Document Type C - Proceedings Paper (int. conf.) R&D Document Type Conference Paper Title Advances in Low Energy Scanning Electron Microscopy Author(s) Müllerová, Ilona (UPT-D) RID, SAI, ORCID
Hovorka, Miloš (UPT-D)
Frank, Luděk (UPT-D) RID, SAI, ORCIDNumber of authors 3 Source Title Proceedings of the 17th IFSM International Microscopy Congress. - Rio de Janeiro : Sociedade Brasileira de Microscopia e Microanilise, 2010 - ISBN 978-85-63273-06-2 Pages s. 256-257 Number of pages 2 s. Action International Microscopy Congress (IMC17) /17./ Event date 19.09.2010-24.09.2010 VEvent location Rio de Janeiro Country BR - Brazil Event type WRD Language eng - English Country BR - Brazil Keywords electron microscopy ; cathode lens ; slow backscattered electrons ; STEM ; VLESTEM Subject RIV JA - Electronics ; Optoelectronics, Electrical Engineering R&D Projects IAA100650902 GA AV ČR - Academy of Sciences of the Czech Republic (AV ČR) CEZ AV0Z20650511 - UPT-D (2005-2011) Annotation Among traditional methods of the electron microscopy (EM) the transmission EM operates at highest energies of electrons and the sample used to be immersed in strong magnetic field. The emission EM has its sample emitting very slow electrons in strong electric field of the cathode lens (CL). The conventional scanning EM (SEM) worked in the medium energy range with the sample in a field free space. Immersion of the SEM sample into magnetic field (and correction of aberrations) improved the resolution up to observation of single atoms. When transferring the CL principle into the SEM we preserve a small primary spot down to lowest energies with the electric field strength as a factor limiting the resolution. Workplace Institute of Scientific Instruments Contact Martina Šillerová, sillerova@ISIBrno.Cz, Tel.: 541 514 178 Year of Publishing 2011
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