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Interferometric nanocomparator for calibrating precision displacement sensors
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SYSNO ASEP 0352218 Document Type C - Proceedings Paper (int. conf.) R&D Document Type Conference Paper Title Interferometric nanocomparator for calibrating precision displacement sensors Author(s) Čížek, Martin (UPT-D) RID, ORCID, SAI
Buchta, Zdeněk (UPT-D) RID, SAI, ORCID
Mikel, Břetislav (UPT-D) RID, SAI
Lazar, Josef (UPT-D) RID, ORCID, SAI
Číp, Ondřej (UPT-D) RID, SAI, ORCIDNumber of authors 5 Source Title Interferometry XV: Applications (Proceedings of SPIE Vol. 7791). - Bellingham : SPIE, 2010 - ISBN 978-0-8194-8287-7 Pages 77910n: 1-7 Number of pages 7 s. Action Interferometry /15./ Event date 02.08.2010 VEvent location San Diego Country US - United States Event type WRD Language eng - English Country US - United States Keywords interferometry ; nanometrology ; calibration Subject RIV BH - Optics, Masers, Lasers CEZ AV0Z20650511 - UPT-D (2005-2011) UT WOS 000296025100021 Annotation Presented work deals with the description of a novel interferometric nanocomparator intended for calibrating displacement sensors with nanometer resolution used in precision engineering. The nanocomparator is based on a 633 nm laser homodyne interferometer with 2-pass measuring arm. Digital signal filtering increases the SNR and allows achieving sub-nanometer resolution of interferometric measurements. High dynamic range of the measuring mirror displacement is achieved using a two-stage positioning system formed of a linear guide way and piezoelectric actuators. A linear guide way is used for positioning over a 100 mm range with 50 nm resolution. Piezoelectric actuators linked in a closed loop locked to the interferometer value are used for fine positioning with better than 1 nm resolution over a 5 um range. Workplace Institute of Scientific Instruments Contact Martina Šillerová, sillerova@ISIBrno.Cz, Tel.: 541 514 178 Year of Publishing 2011
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