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Semiconductor laser sources at 760 nm wavelength for nanometrology
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SYSNO ASEP 0352185 Document Type C - Proceedings Paper (int. conf.) R&D Document Type Conference Paper Title Semiconductor laser sources at 760 nm wavelength for nanometrology Author(s) Mikel, Břetislav (UPT-D) RID, SAI
Buchta, Zdeněk (UPT-D) RID, SAI, ORCID
Lazar, Josef (UPT-D) RID, ORCID, SAI
Číp, Ondřej (UPT-D) RID, SAI, ORCIDNumber of authors 4 Source Title Proceedings of the 9th WSEAS International Conference on Microelectronics, Nanoelectronics, Optoelectronic. - Sofia : WSEAS EUROPMENT Press, 2010 - ISSN 1790-5117 - ISBN 978-954-92600-3-8 Pages s. 96-101 Number of pages 6 s. Action WSEAS International Conference on Microelectronics, Nanoelectronics, Optoelectronic /9./ Event date 29.05.2010-31.10.2010 VEvent location Catania Country IT - Italy Event type WRD Language eng - English Country BG - Bulgaria Keywords laser interferometry ; absolute measurement ; tunable laser diodes Subject RIV BH - Optics, Masers, Lasers R&D Projects 2A-1TP1/127 GA MPO - Ministry of Industry and Trade (MPO) ED0017/01/01 GA MŠMT - Ministry of Education, Youth and Sports (MEYS) GP102/09/P293 GA ČR - Czech Science Foundation (CSF) GP102/09/P630 GA ČR - Czech Science Foundation (CSF) CEZ AV0Z20650511 - UPT-D (2005-2011) Annotation Measurement with nanometer resolution is required for the next advance in nanotechnology. Especially the noncontacting methods of measurement are very .promising. We present the set-up of the laser interferometer with nanometer resolution. A stabilized laser source with the DFB (Distributed FeedBack) laser diode was developed and its realization was implemented to the laser interferometer. The output of the DFB laser source and the design of optical set-up of the laser interferometer are realized by fiber optics. It will improve repeatability of measuring by reducing the influence of the index of refraction of air. The measurement probe is realized by standard optical fiber with reflection coated optical connector. Due to using of the DFB laser source it is possible to measure of the length in incremental or absolute regime. The stability and the tunability of the wavelength of the laser source are crucial parameters to improve resolution and accuracy of the laser interferometer. Workplace Institute of Scientific Instruments Contact Martina Šillerová, sillerova@ISIBrno.Cz, Tel.: 541 514 178 Year of Publishing 2011
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