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Determination of electron density and temperature in a capacitively coupled RF discharge in neon by OES complemented with a CR model
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SYSNO 0350874 Title Determination of electron density and temperature in a capacitively coupled RF discharge in neon by OES complemented with a CR model Author(s) Navrátil, Z. (CZ)
Dvořák, P. (CZ)
Brzobohatý, Oto (UPT-D) RID, ORCID, SAI
Trunec, D. (CZ)Source Title Journal of Physics D-Applied Physics. Roč. 43, Nov 3 (2010), 505203:1-11. - : Institute of Physics Publishing Document Type Článek v odborném periodiku Grant GA202/07/1669 GA ČR - Czech Science Foundation (CSF) CEZ AV0Z20650511 - UPT-D (2005-2011) Language eng Country GB Keywords electron temperature * electron density * optical emission spectroscopy * collisional–radiative model Permanent Link http://hdl.handle.net/11104/0190757
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