Number of the records: 1
Modification of the Schottky Fe ZrO/W electron emitter
- 1.
SYSNO ASEP 0350657 Document Type C - Proceedings Paper (int. conf.) R&D Document Type Conference Paper Title Modification of the Schottky Fe ZrO/W electron emitter Author(s) Matějka, František (UPT-D) RID, SAI
Horáček, Miroslav (UPT-D) RID, ORCID, SAI
Kolařík, Vladimír (UPT-D) RID, ORCID, SAI
Král, Stanislav (UPT-D) RID, SAINumber of authors 4 Source Title Proceedings of the 12th International Seminar on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation. - Brno : Institute of Scientific Instruments AS CR, v.v.i, 2010 / Mika F. - ISBN 978-80-254-6842-5 Pages s. 13-14 Number of pages 2 s. Action International Seminar on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation /12./ Event date 31.05.2010-04.06.2010 VEvent location Skalský dvůr Country CZ - Czech Republic Event type WRD Language eng - English Country CZ - Czech Republic Keywords Schottky electron emitter ; e-beam writing system ; point projection Subject RIV JA - Electronics ; Optoelectronics, Electrical Engineering R&D Projects IAA100650803 GA AV ČR - Academy of Sciences of the Czech Republic (AV ČR) FR-TI1/576 GA MPO - Ministry of Industry and Trade (MPO) ED0017/01/01 GA MŠMT - Ministry of Education, Youth and Sports (MEYS) CEZ AV0Z20650511 - UPT-D (2005-2011) UT WOS 000290773700003 Annotation A Schottky electron emitter with a layer of ZrOx is used in our e-beam writing system working with a rectangular-shaped electron beam. The low radius of the tip less than 300 nm is necessary for the proper function of the electron-optical system based on the principle of point projection. We studied the influence of both the surface treatment and the change of the shape of the tip on the emission characteristics. Workplace Institute of Scientific Instruments Contact Martina Šillerová, sillerova@ISIBrno.Cz, Tel.: 541 514 178 Year of Publishing 2011
Number of the records: 1