Damage studies of multilayer optics for XUV free electron lasers

LOUIS, E., KHORSAND, A.R., SOBIERAJSKI, R., VAN HATTUM, E.D., JUREK, M., KLINGER, D., PELKA, J. B., JUHA, Libor, CHALUPSKÝ, Jaromír, CIHELKA, Jaroslav, HÁJKOVÁ, Věra, JASTROW, U., TOLEIKIS, S., WABNITZ, H., TIEDTKE, K.I., GAUDIN, J., GULLIKSON, E.M., BIJKERK, F. Damage studies of multilayer optics for XUV free electron lasers. In: JUHA, L., BAJT, S., SOBIERAJSKI, R., eds. Damage to VUV, EUV, and X-ray Optics II. Bellingham: SPIE, 2009, 73610I /1-73610I /6. Proceedings of SPIE, 7361. ISBN 9780819476357. ISSN 0277-786x. Available: http://dx.doi.org/10.1117/12.822257