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Efficient materials processing by dual action of XUV/Vis-NIR ultrashort laser pulses
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SYSNO ASEP 0335782 Document Type C - Proceedings Paper (int. conf.) R&D Document Type Conference Paper Title Efficient materials processing by dual action of XUV/Vis-NIR ultrashort laser pulses Author(s) Jakubczak, Krzysztof (FZU-D)
Mocek, Tomáš (FZU-D) RID, ORCID, SAI
Polan, Jiří (FZU-D)
Homer, Pavel (FZU-D) RID
Rus, Bedřich (FZU-D) ORCID
Kim, I. J. (KR)
Kim, C. M. (KR)
Park, S.B. (KR)
Kim, T.K. (KR)
Lee, G.H. (KR)
Nam, C. H. (KR)
Chalupský, Jaromír (FZU-D) RID, ORCID
Hájková, Věra (FZU-D) RID, ORCID
Juha, Libor (FZU-D) RID, ORCID, SAI
Sobota, Jaroslav (UPT-D) RID, ORCID, SAI
Fořt, Tomáš (UPT-D) RID, ORCID, SAISource Title Damage to VUV, EUV, and X-ray Optics II. - Bellingham : SPIE, 2009 / Juha L. ; Bajt S. ; Sobierajski R. - ISSN 0277-786x - ISBN 9780819476357 Pages 73610a/1-73610a/5 Number of pages 5 s. Action Damage to VUV, EUV, and X-Ray Optics II Event date 21.04.2009-23.04.2009 VEvent location Prague Country CZ - Czech Republic Event type WRD Language eng - English Country US - United States Keywords High-order Harmonic Generation (HHG) ; materials machining ; nanopatterning ; femtosecond laser pulses ; Laser Induced Periodic Surface Structures (LIPSS) Subject RIV BH - Optics, Masers, Lasers R&D Projects KAN300100702 GA AV ČR - Academy of Sciences of the Czech Republic (AV ČR) LC510 GA MŠMT - Ministry of Education, Youth and Sports (MEYS) LC528 GA MŠMT - Ministry of Education, Youth and Sports (MEYS) LA08024 GA MŠMT - Ministry of Education, Youth and Sports (MEYS) GC202/07/J008 GA ČR - Czech Science Foundation (CSF) CEZ AV0Z10100523 - FZU-D (2005-2011) AV0Z20650511 - UPT-D (2005-2011) Annotation We demonstrate a novel experimental method for efficient structural surface modification of various solids (PMMA, amorphous carbon) achieved by simultaneous action of XUV (21.6 nm), obtained from High-order Harmonic Generation (HHG), and Vis-NIR (410/820 nm) laser pulses. Although the fluence of each individual pulse was far below the surface ablation threshold, very efficient and specific material modification was observed after irradiation even by a single shot of mixed XUV/Vis-NIR radiation. Workplace Institute of Physics Contact Kristina Potocká, potocka@fzu.cz, Tel.: 220 318 579 Year of Publishing 2010
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