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Interferometric Nanoscale Comparator
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SYSNO ASEP 0335249 Document Type C - Proceedings Paper (int. conf.) R&D Document Type Conference Paper Title Interferometric Nanoscale Comparator Author(s) Čížek, Martin (UPT-D) RID, ORCID, SAI
Šmíd, Radek (UPT-D) RID, SAI
Hrabina, Jan (UPT-D) RID, ORCID, SAI
Lazar, Josef (UPT-D) RID, ORCID, SAI
Číp, Ondřej (UPT-D) RID, SAI, ORCIDNumber of authors 5 Source Title MOC'09 - 15th Microoptics Conference. - Tokyo : Microoptics Group (OSJ/JSAP), 2009 - ISBN 978-4-86348-037-7 Pages s. 218-219 Number of pages 2 s. Action MOC'09 - Microoptics Conference /15./ Event date 25.10.2009-28.10.2009 VEvent location Tokyo Country JP - Japan Event type WRD Language eng - English Country JP - Japan Keywords interferometric nanocomparator ; laser interferometer Subject RIV BH - Optics, Masers, Lasers R&D Projects LC06007 GA MŠMT - Ministry of Education, Youth and Sports (MEYS) 2C06012 GA MŠMT - Ministry of Education, Youth and Sports (MEYS) 2A-1TP1/127 GA MPO - Ministry of Industry and Trade (MPO) FT-TA3/133 GA MPO - Ministry of Industry and Trade (MPO) 2A-3TP1/113 GA MPO - Ministry of Industry and Trade (MPO) GA102/09/1276 GA ČR - Czech Science Foundation (CSF) GA102/07/1179 GA ČR - Czech Science Foundation (CSF) GP102/09/P630 GA ČR - Czech Science Foundation (CSF) KAN311610701 GA AV ČR - Academy of Sciences of the Czech Republic (AV ČR) CEZ AV0Z20650511 - UPT-D (2005-2011) Annotation Presented paper describes a novel portable interferometric nanocomparator for calibraring displacement sensors in precision industry. Digital quadrature detector with high resolution based on a digital signal controller is used for processing the X-Y signals from the detection unit of the interferometer. Digital filtering increases signal to noise ratio and results in sub-nanometer resolution and accuracy of the laser interferometer. High dynamic range of the measuring mirror displacement is achieved using a two stage positioning system formed of a linear guide way and piezoelectric actuators. Workplace Institute of Scientific Instruments Contact Martina Šillerová, sillerova@ISIBrno.Cz, Tel.: 541 514 178 Year of Publishing 2010
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