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Langmuir probe diagnostics of a plasma jet system
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SYSNO ASEP 0325016 Document Type J - Journal Article R&D Document Type Journal Article Subsidiary J Článek ve WOS Title Langmuir probe diagnostics of a plasma jet system Title Diagnostika plazmového tryskového systému pomocí Langmuirovské sondy Author(s) Tichý, M. (CZ)
Hubička, Zdeněk (FZU-D) RID, ORCID, SAI
Šícha, Miloš (FZU-D)
Čada, Martin (FZU-D) RID, ORCID, SAI
Olejníček, Jiří (FZU-D) RID, ORCID
Churpita, Olexandr (FZU-D) RID, ORCID
Jastrabík, Lubomír (FZU-D) RID, ORCID
Virostko, Petr (FZU-D)
Adámek, Petr (FZU-D) RID, ORCID
Kudrna, Pavel (FZU-D)
Leshkov, S. (CZ)
Chichina, Mariya (FZU-D)
Kment, Štěpán (FZU-D) RID, ORCIDSource Title Plasma Sources Science & Technology. - : Institute of Physics Publishing - ISSN 0963-0252
Roč. 18, č. 1 (2009), 014009/1-014009/11Number of pages 11 s. Language eng - English Country GB - United Kingdom Keywords Langmuir probe ; plasma jet ; deposition Subject RIV BH - Optics, Masers, Lasers R&D Projects KJB100100703 GA AV ČR - Academy of Sciences of the Czech Republic (AV ČR) KJB100100707 GA AV ČR - Academy of Sciences of the Czech Republic (AV ČR) 1M06002 GA MŠMT - Ministry of Education, Youth and Sports (MEYS) CEZ AV0Z10100522 - FZU-D (2005-2011) UT WOS 000262897600011 DOI 10.1088/0963-0252/18/1/014009 Annotation Selected recent results on the application of Langmuir probes to diagnose plasma jet systems are presented. To demonstrate the versatility of the Langmuir probe method we give examples of measurements of the spatial distribution of the plasma parameters as well as their temporal dependence in cases when the plasma jet system operates in a pulsed regime. A part of this paper is devoted to introducing the Langmuir probe technique, especially with regard to its application under conditions when collisions between the charged and neutral particles in the probe sheath cannot be neglected and when the electron energy distribution function in plasma cannot be approximated by a Maxwellian one. In the experimental part we present Langmuir probe measurement of low-pressure and atmospheric-pressure plasma jet systems that are currently used for experiments with deposition of materials with special properties. Workplace Institute of Physics Contact Kristina Potocká, potocka@fzu.cz, Tel.: 220 318 579 Year of Publishing 2009
Number of the records: 1