Number of the records: 1
A new method for mechanical testing of thin films: application to Aluminum
- 1.
SYSNO ASEP 0324017 Document Type J - Journal Article R&D Document Type Journal Article Subsidiary J Ostatní články Title A new method for mechanical testing of thin films: application to Aluminum Title Nová metoda mechanického zkoušení tenkých vrstev: aplikace na hliník Author(s) Kruml, Tomáš (UFM-A) RID, ORCID
Stranyánek, Martin (FZU-D)
Čtvrtlík, Radim (FZU-D) RID, ORCID
Boháč, Petr (FZU-D) RID, ORCID
Vystavěl, T. (CZ)
Pánek, P. (CZ)Source Title Journal of Materials Research. - : Springer - ISSN 0884-2914
Roč. 24, - (2009), s. 1353-1360Number of pages 8 s. Language eng - English Country US - United States Keywords microcompression ; FIB ; nanoindentation ; thin films Subject RIV JJ - Other Materials R&D Projects KAN301370701 GA AV ČR - Academy of Sciences of the Czech Republic (AV ČR) CEZ AV0Z20410507 - UFM-A (2005-2011) AV0Z10100522 - FZU-D (2005-2011) DOI 10.1557/JMR.2009.0154 Annotation A new method for measuring plastic properties of thin films deposited on a substrate is presented. Micrometric cylindrical specimens with the axis perpendicular to the film surface were prepared by milling out the surrounding material using the focused ion beam technique. Such specimens were deformed by means of a nanoindenter outfitted with a flat diamond tip. An equivalent to the macroscopic compressive curve was obtained. Elastic modulus and hardness of the film were then measured using a Berkovich tip. The precise knowledge of the gage length and the independent measurement of elastic properties enable the accurate determination of the stress–strain curve. As compared with the results published in the literature on the specimens with the same dimensions, the studied material deforms less heterogeneously, probably as a consequence of the symmetric crystallographic orientation of the specimens. Workplace Institute of Physics of Materials Contact Yvonna Šrámková, sramkova@ipm.cz, Tel.: 532 290 485 Year of Publishing 2009
Number of the records: 1