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Deposition of Ba.sub.x./sub.Sr.sub.1-x./sub.TiO.sub.3./sub. thin films by double RF hollow cathode plasma jet system
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SYSNO 0319065 Title Deposition of BaxSr1-xTiO3 thin films by double RF hollow cathode plasma jet system Title Depozice tenkých vrstev BaxSr1-xTiO3 pomocí systému dvou vysokofrekvenčních plazmových trysek s efektem duté katody Author(s) Hubička, Zdeněk (FZU-D) RID, ORCID, SAI
Virostko, Petr (FZU-D)
Tichý, M. (CZ)
Čada, Martin (FZU-D) RID, ORCID, SAI
Adámek, Petr (FZU-D) RID, ORCID
Olejníček, Jiří (FZU-D) RID, ORCID
Deyneka, Alexander (FZU-D)
Churpita, Olexandr (FZU-D) RID, ORCID
Valvoda, V. (CZ)
Jastrabík, Lubomír (FZU-D) RID, ORCIDSource Title Contributions to Plasma Physics. Roč. 48, 5-7 (2008), s. 515-520. - : Wiley Document Type Článek v odborném periodiku Grant KAN301370701 GA AV ČR - Academy of Sciences of the Czech Republic (AV ČR) KJB100100707 GA AV ČR - Academy of Sciences of the Czech Republic (AV ČR) 1QS100100563 GA AV ČR - Academy of Sciences of the Czech Republic (AV ČR) GA202/06/0776 GA ČR - Czech Science Foundation (CSF) CEZ AV0Z10100522 - FZU-D (2005-2011) Language eng Country DE Keywords BSTO * ferroelectric films * hollow cathode * Langmuir probe * optical emission spectroscopy * plasma jet Permanent Link http://hdl.handle.net/11104/0168325
Number of the records: 1