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Formation of excited Ag atoms in sputtering of silver
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SYSNO ASEP 0304154 Document Type J - Journal Article R&D Document Type Journal Article Subsidiary J Ostatní články Title Formation of excited Ag atoms in sputtering of silver Author(s) Šroubek, Zdeněk (URE-Y)
Šroubek, Filip (UTIA-B) RID, ORCID
Wucher, A. (DE)
Yarmoff, J. A. (US)Source Title Physical Review B - ISSN 0163-1829
Roč. 68, č. 11 (2003), s. 1154261-1154265Number of pages 5 s. Language eng - English Country US - United States Keywords ionisation ; collision processes ; sputtering Subject RIV BM - Solid Matter Physics ; Magnetism R&D Projects ME 469 GA MŠMT - Ministry of Education, Youth and Sports (MEYS) ME 328 GA MŠMT - Ministry of Education, Youth and Sports (MEYS) CEZ AV0Z2067918 - URE-Y Annotation A model is presented of the formation of escited Ag.sup.*.sup. (4d.sup.9 .sup.5s.sup.2.sup.) atoms during sputtering of Ag metal by energetic Ar.sup.+.sup. ions. The essential part of the formation process is the slow diffusion of 4d-holes in the collision cascade from the sites of violet Ag-Ag collisions to the emitted Ag atoms. Computer simulation of Ag cascades and of the 4d-hole trasnport allows us to quantify the model and to describe all characteristic features of the available experimental data, in particular the fact that the sputtered Ag.sup.*.sup. atoms exhibit a narrower kinetic energy distribution than those ejected in the electronic ground state. Workplace Institute of Radio Engineering and Electronics Contact Petr Vacek, vacek@ufe.cz, Tel.: 266 773 413, 266 773 438, 266 773 488 Year of Publishing 2004
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