Imaging of the boron doping in silicon using low energy SEM

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SYSNO	0205568
Title	Imaging of the boron doping in silicon using low energy SEM
Author(s)	Müllerová, Ilona (UPT-D)_{RID, SAI, ORCID} El-Gomati, M. (GB) Frank, Luděk (UPT-D)_{RID, SAI, ORCID}
Source Title	Ultramicroscopy. Roč. 93, 3/4 (2002), s. 223 - 243. - : Elsevier
Document Type	Článek v odborném periodiku
Grant	IAA1065901 GA AV ČR - Academy of Sciences of the Czech Republic (AV ČR)
	IBS2065017 GA AV ČR - Academy of Sciences of the Czech Republic (AV ČR)
CEZ	AV0Z2065902 - UPT-D
Language	eng
Country	NL
Keywords	electron and ion microscopes * semiconductor doping
Permanent Link	http://hdl.handle.net/11104/0101181

Number of the records: 1