Number of the records: 1
Imaging of the boron doping in silicon using low energy SEM
- 1.Müllerová, Ilona - El-Gomati, M. - Frank, Luděk
Imaging of the boron doping in silicon using low energy SEM.
Ultramicroscopy. Roč. 93, 3/4 (2002), s. 223 - 243. ISSN 0304-3991. E-ISSN 1879-2723
Impact factor: 1.772, year: 2002
http://hdl.handle.net/11104/0101181
Number of the records: 1