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Imaging of the boron doping in silicon using low energy SEM
- 1.MÜLLEROVÁ, I., EL-GOMATI, M., FRANK, L. Imaging of the boron doping in silicon using low energy SEM. Ultramicroscopy. 2002, 93(3/4), 223 - 243. ISSN 0304-3991. E-ISSN 1879-2723.
Number of the records: 1