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Imaging of specimens at optimized low and very low energies in scanning electron microscopy
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SYSNO ASEP 0205544 Document Type J - Journal Article R&D Document Type Journal Article Subsidiary J Ostatní články Title Imaging of specimens at optimized low and very low energies in scanning electron microscopy Author(s) Müllerová, Ilona (UPT-D) RID, SAI, ORCID Source Title Scanning Microscopy - ISSN 0891-7035
Roč. 13, č. 1 (1999), s. 7 - 22Number of pages 16 s. Language eng - English Country US - United States Keywords contrast mechanisms ; scanning electron microscope ; low electron energies Subject RIV JA - Electronics ; Optoelectronics, Electrical Engineering R&D Projects IAA2065502 GA AV ČR - Academy of Sciences of the Czech Republic (AV ČR) GA202/95/0280 GA ČR - Czech Science Foundation (CSF) GA202/96/0961 GA ČR - Czech Science Foundation (CSF) CEZ AV0Z2065902 - UPT-D Annotation A modern trend toward low electron energies in scanning electron microscopy (SEM), characterised by lowering the acceleration voltages in low voltage SEM (LVSEM) or by utilising a retarding-field optical element in low energy SEM (LESEM), makes the energy range where new contrasts appear accessible. This range is further extended by a cathode-lens equipped scanning low energy electron microscope (SLEEM) which achieves nearly constant spatial resolution throughout the energy scale. This enables one to optimise freely the electron beam energy according to the ask. At low energies, classes of image contrast exist that make visitable particular specimen data most effectively or even exclusively within certain energy intervals or at certain energy values only. Some contrasts are well understood and can already be utilised for practical surface examinations but others are not yet reliably explained and complementary experiments are needed. Workplace Institute of Scientific Instruments Contact Martina Šillerová, sillerova@ISIBrno.Cz, Tel.: 541 514 178 Year of Publishing 2003
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