Number of the records: 1
Acquisition of multi-dimensional image in the scanning electron microscope
- 1.0205506 - UPT-D 20020056 RIV CZ eng C - Conference Paper (international conference)
Horáček, Miroslav
Acquisition of multi-dimensional image in the scanning electron microscope.
Proceedings of the 8th international seminar, held in Skalský dvůr. Brno: Ústav přístrojové techniky Akademie věd České republiky, 2002 - (Frank, L.), s. 37 - 38. ISBN 80-238-8986-9.
[Recent trends in charged particle optics and surface physics instrumentation. Skalský dvůr (CZ), 08.07.2002-12.07.2002]
R&D Projects: GA ČR GA102/00/P001
Institutional research plan: CEZ:AV0Z2065902
Keywords : signal electrons * angular distribution
Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering
The possibilities of acquisition of the energy spectrum of signal electrons or angular distribution for every point of the scanning matrix on the specimen in SEM were studied and suitable fast position sensitive detector was designed.
Permanent Link: http://hdl.handle.net/11104/0101119
Number of the records: 1