Number of the records: 1
SLEEM Imaging of Doping Patterns in Semiconductors
- 1.0205406 - UPT-D 20010046 RIV IT eng C - Conference Paper (international conference)
Müllerová, Ilona - Frank, Luděk - El Gomati, M. M.
SLEEM Imaging of Doping Patterns in Semiconductors.
Proceedings of 5th Multinational Congress on Electron Microscopy. Lecce: Rinton Press, 2001 - (Dini, L.; Catalano, M.), s. 317-318. ISBN 1-58949-003-7.
[MCEM '01 /5./ - Multinational Congress on Electron Microscopy. Lecce (IT), 20.09.2001-25.09.2001]
R&D Projects: GA AV ČR IAA1065901
Institutional research plan: CEZ:AV0Z2065902
Keywords : UHV SEM * low energy range
Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering
Permanent Link: http://hdl.handle.net/11104/0101020
Number of the records: 1