Number of the records: 1
Xenon capillary discharge as a source of soft X-ray
- 1.0179037 - UFP-V 20020054 RIV CZ eng J - Journal Article
Vrba, Pavel - Vrbová, M.
Xenon capillary discharge as a source of soft X-ray.
Czechoslovak Journal of Physics. Roč. 52, supplement D (2002), s. 112-116. ISSN 0011-4626.
[Symposium on Plasma Physics and Technology/20th./. Prague, 10.06.2002-13.06.2002]
Institutional research plan: CEZ:AV0Z2043910
Keywords : capillary discharge, soft X-ray
Subject RIV: BL - Plasma and Gas Discharge Physics
Impact factor: 0.311, year: 2002
A novel type of capillary discharge device was demonstrated to obtain soft X-ray emission compplying with the demand for the future micro lithography[1].Experiments with the Xenon filled capillary lead to generation of incoherent radiation in the spectral region (13ö14)nm.We have done a theoretical analysis of the experiment based on previous work[2].
Permanent Link: http://hdl.handle.net/11104/0001641
Number of the records: 1