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Synthesis of High Purity Si3N4 and SiC Powders by CVD Method
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SYSNO ASEP 0162484 Document Type J - Journal Article R&D Document Type Journal Article Subsidiary J Ostatní články Title Synthesis of High Purity Si3N4 and SiC Powders by CVD Method Author(s) Halamka, M. (CZ)
Kavecký, Š. (SK)
Dočekal, Bohumil (UIACH-O) RID, ORCID
Madejová, J. (SK)
Šajgalík, P. (SK)Source Title Ceramics - Silikáty. - : University of Chemistry and Technology Prague - ISSN 0862-5468
Roč. 47, č. 3 (2003), s. 88-93Number of pages 6 s. Language eng - English Country SK - Slovakia Keywords high purity ceramics ; trace element analysis ; atomic absorption spectrometry Subject RIV CB - Analytical Chemistry, Separation CEZ AV0Z4031919 - UIACH-O Annotation Fine, sub-micrometer, amorphous powders of SiC and Si3N4 have been prepared from SiH4 - NH3 and C2H2 - SiH4 gaseous systems respectively, in a tubular flow reactor. The particle size of powders prepared at 1373 K is in the range of 50 - 150 nm and 10 to 100 nm for Si3N4 and SiC, respectively. The content of metal impurities (Al, Cr, Cu and Fe) in the presented powders is one order of magnitude lower compared to the commercially available powders prepared by other methods. Workplace Institute of Analytical Chemistry Contact Iveta Drobníková, drobnikova@iach.cz, Tel.: 532 290 234 Year of Publishing 2004
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