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Probe diagnostics of the RF barrier-torch discharge at atmospheric pressure
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SYSNO ASEP 0134423 Document Type J - Journal Article R&D Document Type Journal Article Subsidiary J Ostatní články Title Probe diagnostics of the RF barrier-torch discharge at atmospheric pressure Author(s) Čada, Martin (FZU-D) RID, ORCID, SAI
Hubička, Zdeněk (FZU-D) RID, ORCID, SAI
Šícha, Miloš (FZU-D)
Churpita, Olexandr (FZU-D) RID, ORCID
Jastrabík, Lubomír (FZU-D) RID, ORCID
Soukup, Ladislav (FZU-D)
Tichý, M. (CZ)Source Title Surface and Coatings Technology. - : Elsevier - ISSN 0257-8972
174-175, - (2003), s. 530-534Number of pages 5 s. Language eng - English Country NL - Netherlands Keywords atmospheric barrier-torch ; Langmuir probe ; double probe Subject RIV BM - Solid Matter Physics ; Magnetism R&D Projects IBS1010203 GA AV ČR - Academy of Sciences of the Czech Republic (AV ČR) GA202/00/1592 GA ČR - Czech Science Foundation (CSF) CEZ AV0Z1010914 - FZU-D Annotation We present measurements of the electron temperature Te in the RF barrier-torch discharge by means of the planar RF-compensated Langmuir probe. The probe was mounted at the substrate position. The natural gas temperature has been measured by optical diagnostics and found to be 400-800K. The plasma of the RF barrier-torch discharge is therefore strongly non-isothermal even at such high operation pressure. Workplace Institute of Physics Contact Kristina Potocká, potocka@fzu.cz, Tel.: 220 318 579 Year of Publishing 2004
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