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Nitrogen rich carbon nitride thin films deposited by hybrid PLD technique

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    SYSNO ASEP0133845
    Document TypeJ - Journal Article
    R&D Document TypeJournal Article
    Subsidiary JOstatní články
    TitleNitrogen rich carbon nitride thin films deposited by hybrid PLD technique
    Author(s) Jelínek, Miroslav (FZU-D) RID, ORCID
    Kulish, W. (DE)
    Lančok, Ján (FZU-D) RID, ORCID
    Popov, C. (DE)
    Bulíř, Jiří (FZU-D) RID, ORCID, SAI
    Delplancke-Ogletree, M. P. (BE)
    Source TitleMolecular Crystals and Liquid Crystals - ISSN 1058-725X
    Roč. 374, - (2002), s. 207-210
    Number of pages4 s.
    Languageeng - English
    CountryGB - United Kingdom
    Keywordslaser deposition ; carbon nitride ; radiofrequency discharge ; hollow cathode discharge
    Subject RIVBM - Solid Matter Physics ; Magnetism
    CEZAV0Z1010914 - FZU-D
    AnnotationHighly nitrogenated CNx films were created by pulsed laser deposition, combined with radiofrequency and hollow cathode discharges. The N/C ratio higher than 1 was measured. Deposition set- up and results of optical measurement are discussed.
    WorkplaceInstitute of Physics
    ContactKristina Potocká, potocka@fzu.cz, Tel.: 220 318 579
    Year of Publishing2003

Number of the records: 1  

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