Number of the records: 1
Copper nitride thin films prepared by the RF plasma chemical reactor with low pressure supersonic single and multi-plasma jet system
- 1.
SYSNO 0132837 Title Copper nitride thin films prepared by the RF plasma chemical reactor with low pressure supersonic single and multi-plasma jet system Author(s) Soukup, Ladislav (FZU-D)
Šícha, M. (CZ)
Fendrych, František (FZU-D) RID, ORCID, SAI
Jastrabík, Lubomír (FZU-D) RID, ORCID
Hubička, Zdeněk (FZU-D) RID, ORCID, SAI
Chvostová, Dagmar (FZU-D) RID, SAI, ORCID
Šíchová, H. (CZ)
Valvoda, V. (CZ)
Tarasenko, A. A. (UA)
Studnička, Václav (FZU-D) RID
Wagner, T. (DE)
Novák, Miloš (FZU-D)Source Title Surface and Coatings Technology. 116-119, - (1999), s. 321-326. - : Elsevier Conference International Congerence on Plasma Surface Engineering /6./, Garmisch-Partenkirchen, 14.09.1998-18.09.1998 Document Type Článek v odborném periodiku Grant IPP1067701 GA AV ČR - Academy of Sciences of the Czech Republic (AV ČR) CEZ AV0Z1010914 - FZU-D Language eng Country CH Permanent Link http://hdl.handle.net/11104/0030834
Number of the records: 1