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Plasma diagnostics by energy-resolved mass spectroscopy of ions during triode ion plating of TiN films

    1.
    SYSNO0131624
    TitlePlasma diagnostics by energy-resolved mass spectroscopy of ions during triode ion plating of TiN films
    Author(s) Kadlec, Stanislav (FZU-D) ORCID
    Maček, M. (SI)
    Wouters, S. (BE)
    Navinšek, B. (SI)
    Paujan, P. (SI)
    Quaeyhaegeis, C. (BE)
    Stals, L. M. (BE)
    Source TitleInternational Congres on Plasma Physics. s. 2805-2808 / Pavlo P.. - Praha : European Physics Society, 1998
    Conference Conference on Controlled Fusion and Plasma Physics /25./ (1998 ICPP), Praha, 29.06.1998-03.07.1998
    Document TypeKonferenční příspěvek (zahraniční konf.)
    Grant GV106/96/K245 GA ČR - Czech Science Foundation (CSF)
    HTECH.CRG970529, XX
    Languageeng
    CountryCZ
    Permanent Linkhttp://hdl.handle.net/11104/0029682
     

Number of the records: 1  

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