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Plasma diagnostics by energy-resolved mass spectroscopy of ions during triode ion plating of TiN films
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SYSNO ASEP 0131624 Document Type C - Proceedings Paper (int. conf.) R&D Document Type Conference Paper Title Plasma diagnostics by energy-resolved mass spectroscopy of ions during triode ion plating of TiN films Author(s) Kadlec, Stanislav (FZU-D) ORCID
Maček, M. (SI)
Wouters, S. (BE)
Navinšek, B. (SI)
Paujan, P. (SI)
Quaeyhaegeis, C. (BE)
Stals, L. M. (BE)Source Title International Congres on Plasma Physics / Pavlo P.. - Praha : European Physics Society, 1998 Pages s. 2805-2808 Number of pages 4 s. Action Conference on Controlled Fusion and Plasma Physics /25./ (1998 ICPP) Event date 29.06.1998-03.07.1998 VEvent location Praha Country CZ - Czech Republic Language eng - English Country CZ - Czech Republic Subject RIV BL - Plasma and Gas Discharge Physics R&D Projects GV106/96/K245 GA ČR - Czech Science Foundation (CSF) Workplace Institute of Physics Contact Kristina Potocká, potocka@fzu.cz, Tel.: 220 318 579 Year of Publishing 1999
Number of the records: 1