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Plasma diagnostics by energy-resolved mass spectroscopy of ions during triode ion plating of TiN films

  1. 1.
    SYSNO ASEP0131624
    Document TypeC - Proceedings Paper (int. conf.)
    R&D Document TypeConference Paper
    TitlePlasma diagnostics by energy-resolved mass spectroscopy of ions during triode ion plating of TiN films
    Author(s) Kadlec, Stanislav (FZU-D) ORCID
    Maček, M. (SI)
    Wouters, S. (BE)
    Navinšek, B. (SI)
    Paujan, P. (SI)
    Quaeyhaegeis, C. (BE)
    Stals, L. M. (BE)
    Source TitleInternational Congres on Plasma Physics / Pavlo P.. - Praha : European Physics Society, 1998
    Pagess. 2805-2808
    Number of pages4 s.
    ActionConference on Controlled Fusion and Plasma Physics /25./ (1998 ICPP)
    Event date29.06.1998-03.07.1998
    VEvent locationPraha
    CountryCZ - Czech Republic
    Languageeng - English
    CountryCZ - Czech Republic
    Subject RIVBL - Plasma and Gas Discharge Physics
    R&D ProjectsGV106/96/K245 GA ČR - Czech Science Foundation (CSF)
    WorkplaceInstitute of Physics
    ContactKristina Potocká, potocka@fzu.cz, Tel.: 220 318 579
    Year of Publishing1999

Number of the records: 1  

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