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Plasma diagnostics by energy-resolved mass spectroscopy of ions during triode ion plating of TiN films
- 1.Kadlec, S., Maček, M., Wouters, S., Navinšek, B., Paujan, P., Quaeyhaegeis, C., Stals, L. M. Plasma diagnostics by energy-resolved mass spectroscopy of ions during triode ion plating of TiN films. In: PAVLO, P., ed. International Congres on Plasma Physics. Praha: European Physics Society, 1998, s. 2805-2808. European Conference Abstaracts., 22.
Number of the records: 1