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Plasma diagnostics by energy-resolved mass spectroscopy of ions during triode ion plating of TiN films

  1. 1.
    Kadlec, S., Maček, M., Wouters, S., Navinšek, B., Paujan, P., Quaeyhaegeis, C., Stals, L. M. Plasma diagnostics by energy-resolved mass spectroscopy of ions during triode ion plating of TiN films. In: PAVLO, P., ed. International Congres on Plasma Physics. Praha: European Physics Society, 1998, s. 2805-2808. European Conference Abstaracts., 22.

Number of the records: 1  

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